- focused ion beam machining
- обробка сфокусованим іонним променем. Технологія, яка видаляє мікроскопічні частинки матеріалу з поверхні за допомогою розпилювання прискорених і сфокусованих іонів.
English-Ukrainian dictionary of microelectronics. 2013.
focused ion beam machining
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